High Deposition Rate of Diamond-like Carbon on Trench Bottom for Acetylene Gas at Plasma Immersion and Deposition Process

A bright optical emission inside a trench in a solid object was observed during a diamond-like carbon (DLC) deposition process, with the DLC deposition rate being more than two-times faster on the trench's bottom than that on the top of the trench. We found that the secondary electrons inside t...

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Bibliographic Details
Published inPlasma and Fusion Research Vol. 1; p. 048
Main Authors FUJIWARA, Etsuo, NISHIKAWA, Keiichi, KIRINUKI, Michiharu, AZUMA, Kingo, YATSUZUKA, Mitsuyasu
Format Journal Article
LanguageEnglish
Published The Japan Society of Plasma Science and Nuclear Fusion Research 2006
Subjects
Acetylene
acetylene plasma
Deposition
Diamond-like carbon
diamond-like carbon (DLC)
Emission
Immersion
optical emission
plasma implantation
Trenches
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Summary:A bright optical emission inside a trench in a solid object was observed during a diamond-like carbon (DLC) deposition process, with the DLC deposition rate being more than two-times faster on the trench's bottom than that on the top of the trench. We found that the secondary electrons inside the trench played an important role in the higher DLC deposition rate on the trench's bottom.
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ISSN:1880-6821
1880-6821
DOI:10.1585/pfr.1.048