Effects of post-growth thermal annealing on room temperature pulsed laser deposited ZnO thin films

ZnO thin films have been elaborated by Pulsed Laser Deposition (PLD) onto glass substrates, at room temperature. Post-growth annealing treatment was applied to the films in air background. Morphology, chemical composition and optical characteristics of ZnO films were evaluated as a function of annea...

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 687; no. 1; pp. 12028 - 12031
Main Authors Padilla Rueda, D, Vadillo, J M, Laserna, J J
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.02.2016
Subjects
Annealing
Chemical composition
Chemical sensors
Glass substrates
Morphology
Optical measuring instruments
Optical properties
Optoelectronic devices
Physics
Pulsed laser deposition
Pulsed lasers
Room temperature
Stoichiometry
Thin films
Zinc oxide
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Summary:ZnO thin films have been elaborated by Pulsed Laser Deposition (PLD) onto glass substrates, at room temperature. Post-growth annealing treatment was applied to the films in air background. Morphology, chemical composition and optical characteristics of ZnO films were evaluated as a function of annealing temperature. With the increase in annealing temperature, the 002 axis peak intensity is improved and optical band gap is shifted to lower values. The PL peak positions shift are associated at stoichiometry change, it is confirmed with the experimental results. The films elaborated with this experimental setup could be used to applications in short wavelength optoelectronic devices, chemical and optical sensors.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/687/1/012028