Characteristic temperatures and electron number densities in an R.F. capacitively coupled plasma

The excitation temperatures of Ar and Fe, the ionization temperatures of Ar and Ca and the electron number densities have been determined for a radiofrequency capacitively coupled plasma in the tip-ring electrode geometry. The temperatures and the electron number densities possess their maximum valu...

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Published inAnalytical and bioanalytical chemistry Vol. 355; no. 3-4; pp. 250 - 251
Main Authors Anghel, S D, Frentiu, T, Darvasi, E, Rusu, A M, Simon, A, Cordos, E A
Format Journal Article
LanguageEnglish
Published Germany 01.06.1996
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Summary:The excitation temperatures of Ar and Fe, the ionization temperatures of Ar and Ca and the electron number densities have been determined for a radiofrequency capacitively coupled plasma in the tip-ring electrode geometry. The temperatures and the electron number densities possess their maximum value close to the electrodes.
Bibliography:ObjectType-Article-1
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ISSN:1618-2642
1618-2650
DOI:10.1007/s0021663550250