Thermal desorption and infrared studies of sol-gel derived SiO2 coatings on Si wafers

Saved in:
Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 138; no. 7; pp. 2150 - 2153
Main Authors SOKOLL, R, TILLER, H.-J, HOYER, T
Format Journal Article
LanguageEnglish
Published Pennington, NJ Electrochemical Society 01.07.1991
Subjects
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)
Silicon Oxides
Silicon
Thermal annealing
Electronic component
Thermal stability
Thin film
Online AccessGet full text

Cover

More Information
ISSN:0013-4651
1945-7111
DOI:10.1149/1.2085941