Performance evaluation of five-DOF motion in ultra-precision linear stage

In this study, the performance of five-DOF motion in ultra-precision linear stage is evaluated accurately by extending the application of the ISO 230-2 International Standard, which is focused only on the linear displacement motion of a linear stage. The bidirectional accuracy and bidirectional repe...

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Bibliographic Details
Published inInternational journal of precision engineering and manufacturing Vol. 15; no. 1; pp. 129 - 134
Main Authors Lee, Kwang-Il, Lee, Jae-Chang, Yang, Seung-Han
Format Journal Article
LanguageEnglish
Published Berlin/Heidelberg Springer Berlin Heidelberg 2014
Subjects
Engineering
Industrial and Production Engineering
Materials Science
Performance evaluation
Ultra-precision linear stage
ISO 230-2 International standard
Geometric error
Reference coordinate system
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Summary:In this study, the performance of five-DOF motion in ultra-precision linear stage is evaluated accurately by extending the application of the ISO 230-2 International Standard, which is focused only on the linear displacement motion of a linear stage. The bidirectional accuracy and bidirectional repeatability of positioning in five-DOF motion are calculated by measured geometric errors. Five geometric errors except for the linear displacement error of a linear stage are measured simultaneously using the optimal measurement system, which is designed to enhance the standard uncertainty of the estimated geometric errors. The geometric errors are in good agreement with those from the laser interferometer. In addition, the confidence intervals of the performances are determined by the uncertainties of the equipment used in the experiment.
ISSN:2234-7593
2005-4602
DOI:10.1007/s12541-013-0315-4