Deterministic sub-micron 2D grating structures on steel by UV-fs-laser interference patterning

Large area linear and crossed grating structures on steel surfaces are obtained by UV-femtosecond-laser ablation at 248 nm. High resolution on large areas is secured using a beam delivery system based on a two-grating interferometer. Thus, deterministic gratings with periods down to 330 nm and modul...

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Bibliographic Details
Published inApplied physics. A, Materials science & processing Vol. 114; no. 1; pp. 69 - 73
Main Authors Bekesi, J., Simon, P., Ihlemann, J.
Format Journal Article
LanguageEnglish
Published Berlin/Heidelberg Springer Berlin Heidelberg 2014
Subjects
Ablation
Characterization and Evaluation of Materials
Condensed Matter Physics
Interferometers
Invited Paper
Laser beams
Machines
Manufacturing
Modulation
Nanotechnology
Optical and Electronic Materials
Patterning
Physics
Physics and Astronomy
Processes
Stitching
Structural steels
Surfaces and Interfaces
Thin Films
Two dimensional
Grating Pattern
Focal Line
Cylindrical Lens
Modulation Depth
Nanosecond Laser
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Summary:Large area linear and crossed grating structures on steel surfaces are obtained by UV-femtosecond-laser ablation at 248 nm. High resolution on large areas is secured using a beam delivery system based on a two-grating interferometer. Thus, deterministic gratings with periods down to 330 nm and modulation depths of more than 100 nm are fabricated on tool steel and stainless steel. Areas of up to 5 mm × 13 mm can be processed without stitching errors.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0947-8396
1432-0630
DOI:10.1007/s00339-013-8083-7