Determination of tensile properties and residual stresses of Ni-Co thin films

This paper reports tensile properties and residual stresses of Ni-Co thin films. To measure elastic (and plastic) properties, direct tensile tests using dog-bone type specimens are performed first. Assuming that residual stresses vary linearly through the film thickness, bending and membrane residua...

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Bibliographic Details
Published inInternational journal of precision engineering and manufacturing Vol. 11; no. 5; pp. 771 - 778
Main Authors Park, Jun-Hyub, Bae, Hong-Yeol, Kim, Yun-Jae
Format Journal Article
LanguageEnglish
Published Springer Korean Society for Precision Engineering 01.10.2010
Subjects
Engineering
Industrial and Production Engineering
Materials Science
Tensile properties measurement
Finite element analysis
Ni-Co thin film
Residual stress measurement
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Summary:This paper reports tensile properties and residual stresses of Ni-Co thin films. To measure elastic (and plastic) properties, direct tensile tests using dog-bone type specimens are performed first. Assuming that residual stresses vary linearly through the film thickness, bending and membrane residual stress components are measured using cantilever beam and T-structure beam specimens, respectively. Averaged values of Young’s modulus, yield strength and tensile strength are found to be about 163GPa, 1,700MPa and 2,000MPa, respectively. The membrane and bending residual stress components are found to be about 825MPa and 47MPa, respectively.
ISSN:1229-8557
2005-4602
DOI:10.1007/s12541-010-0091-3