Determination of tensile properties and residual stresses of Ni-Co thin films
This paper reports tensile properties and residual stresses of Ni-Co thin films. To measure elastic (and plastic) properties, direct tensile tests using dog-bone type specimens are performed first. Assuming that residual stresses vary linearly through the film thickness, bending and membrane residua...
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Published in | International journal of precision engineering and manufacturing Vol. 11; no. 5; pp. 771 - 778 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Springer
Korean Society for Precision Engineering
01.10.2010
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Subjects | |
Online Access | Get full text |
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Summary: | This paper reports tensile properties and residual stresses of Ni-Co thin films. To measure elastic (and plastic) properties, direct tensile tests using dog-bone type specimens are performed first. Assuming that residual stresses vary linearly through the film thickness, bending and membrane residual stress components are measured using cantilever beam and T-structure beam specimens, respectively. Averaged values of Young’s modulus, yield strength and tensile strength are found to be about 163GPa, 1,700MPa and 2,000MPa, respectively. The membrane and bending residual stress components are found to be about 825MPa and 47MPa, respectively. |
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ISSN: | 1229-8557 2005-4602 |
DOI: | 10.1007/s12541-010-0091-3 |