A theoretical deformation prediction of micro channels in ultra-precision machining

In ultra-precision machining for micro channels, deformation occurs with high frequency. A high aspect ratio, high cutting speed, high feed rate, etc. all lead to deformation. Several studies on the deformation of the machined part of a workpiece have been conducted, but almost all of them have focu...

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Bibliographic Details
Published inInternational journal of precision engineering and manufacturing Vol. 14; no. 2; pp. 173 - 181
Main Authors Duong, Thanh-Hung, Kim, Hyun-Chul, Lee, Dong-Yoon, Lee, Seok-Woo, Park, Eon-Seok, Je, Tae-Jin
Format Journal Article
LanguageEnglish
Published Springer Korean Society for Precision Engineering 01.02.2013
Subjects
Engineering
Industrial and Production Engineering
Materials Science
Machining process
Deformation
Ultra-precision machining
Diamond machining
Micro channel
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Summary:In ultra-precision machining for micro channels, deformation occurs with high frequency. A high aspect ratio, high cutting speed, high feed rate, etc. all lead to deformation. Several studies on the deformation of the machined part of a workpiece have been conducted, but almost all of them have focused on experimental and finite element analyses, which take time and money. This paper presents a theoretical prediction solution for the deformation of the micro channels. To obtain maximum principle stress and deflection of micro rectangular pattern, the model used was a cantilever beam with a distributed load. Furthermore, for verifying this solution, experiments have been carried out to rectangular patterns by diamond turning. The maximum error between the predicted deformation and experimental deformation was approximately 5 μm, which means that this prediction solution works well.
ISSN:2234-7593
2005-4602
DOI:10.1007/s12541-013-0025-y