Electronegative Plasma Structure

It is well understood that simply changing the feed gas from an electropositive to electronegative gas can result in a substantially different discharge structure. We find that the electron pressure (or energy density) can visibly vary for discharges with significant electron attachment, whereas it...

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Bibliographic Details
Published inIEEE transactions on plasma science Vol. 36; no. 4; pp. 996 - 997
Main Authors Goeckner, M.J., Nelson, C.T., Overzet, L.J.
Format Journal Article
LanguageEnglish
Published New York IEEE 01.08.2008
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Density
Diagnostic systems
Diagnostics
Discharge
Electricity
Electron emission
Electron pressure
Electronegativity
Electrons
Electropositivity
Energy density
Experiments
Fault location
Plasma
Plasma confinement
Plasma density
Plasma diagnostics
Plasma glow
Plasma measurements
plasma pressure
Plasma properties
Plasma sources
plasma structure
Plasma temperature
Tellurium
Visual inspection
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Summary:It is well understood that simply changing the feed gas from an electropositive to electronegative gas can result in a substantially different discharge structure. We find that the electron pressure (or energy density) can visibly vary for discharges with significant electron attachment, whereas it is much more uniform for electropositive glows. Such structure in the electron energy density is difficult to measure by using other experimental diagnostics; however, it is relatively easy to see by visual inspection.
Bibliography:ObjectType-Article-1
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ISSN:0093-3813
1939-9375
DOI:10.1109/TPS.2008.922486