Progressive formation of fine and coarse ripples on SiC surface by repeated irradiation of femtosecond laser pulses

In this work, we report the progressive formation of first nanoparticles, next fine ripples, and eventually coarse ripples during the irradiation of single-crystal 6H-SiC surfaces with increasing number of femtosecond laser pulses ( λ  = 515 nm, τ  = 250 fs, repetition rate = 100 kHz). At laser flue...

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Published inApplied physics. B, Lasers and optics Vol. 113; no. 3; pp. 395 - 402
Main Authors Kim, S. H., Byun, K. H., Sohn, I. B., Jeong, S. H.
Format Journal Article
LanguageEnglish
Published Berlin/Heidelberg Springer Berlin Heidelberg 01.12.2013
Subjects
Coarsening
Engineering
Lasers
Optical Devices
Optics
Photonics
Physical Chemistry
Physics
Physics and Astronomy
Quantum Optics
Irradiate Surface
Laser Spot
Femtosecond Laser
Surface Plasmon Polaritons
Laser Fluence
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Summary:In this work, we report the progressive formation of first nanoparticles, next fine ripples, and eventually coarse ripples during the irradiation of single-crystal 6H-SiC surfaces with increasing number of femtosecond laser pulses ( λ  = 515 nm, τ  = 250 fs, repetition rate = 100 kHz). At laser fluences greater than the single-pulse ablation threshold, nanoparticles were produced on the surface by the first few pulses over which fine ripple patterns overlapped at increased pulse numbers. As the pulse number was further increased over ten, the surface was gradually transformed into a coarse ripple–covered one. At laser fluence below the threshold, however, only fine ripples were formed nonuniformly.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0946-2171
1432-0649
DOI:10.1007/s00340-013-5476-4