Laser chemical processing: an overview to the 30th anniversary

Starting with the first experiments on laser-CVD about 30 years ago, the development of laser-chemical processing will be reviewed up to the present status. This includes material deposition, etching, some types of ablation and nanoparticle formation, thin-film synthesis (PLD), and various different...

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Bibliographic Details
Published inApplied physics. A, Materials science & processing Vol. 101; no. 2; pp. 447 - 459
Main Author Bauerle, Dieter
Format Journal Article
LanguageEnglish
Published Berlin/Heidelberg Springer-Verlag 01.11.2010
Subjects
Ablation
Anniversaries
Characterization and Evaluation of Materials
Condensed Matter Physics
Deposition
Etching
Lasers
Machines
Manufacturing
Nanocomposites
Nanomaterials
Nanostructure
Nanotechnology
Optical and Electronic Materials
Physics
Physics and Astronomy
Processes
Surfaces and Interfaces
Thin Films
30th Anniversary
Laser Parameter
Laser Processing
Precursor Molecule
ZnTe
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Summary:Starting with the first experiments on laser-CVD about 30 years ago, the development of laser-chemical processing will be reviewed up to the present status. This includes material deposition, etching, some types of ablation and nanoparticle formation, thin-film synthesis (PLD), and various different types of surface modifications.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0947-8396
1432-0630
DOI:10.1007/s00339-010-5837-3