Efficient broadband silicon-on-insulator grating coupler with low backreflection

We design and fabricate an efficient broadband grating coupler on a 400 nm thick silicon-on-insulator wafer. The measured coupling loss is 3 dB when coupling to a single-mode fiber at 1310 nm wavelength with TE polarization. The spectral FWHM and backreflection are determined to be 58 nm and -27 dB,...

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Bibliographic Details
Published inOptics letters Vol. 36; no. 11; p. 2101
Main Authors Na, Neil, Frish, Harel, Hsieh, I-Wei, Harel, Oshrit, George, Roshan, Barkai, Assia, Rong, Haisheng
Format Journal Article
LanguageEnglish
Published United States 01.06.2011
Subjects
Electric Conductivity
Equipment Design
Equipment Failure Analysis
Optical Devices
Refractometry - instrumentation
Silicon - chemistry
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Summary:We design and fabricate an efficient broadband grating coupler on a 400 nm thick silicon-on-insulator wafer. The measured coupling loss is 3 dB when coupling to a single-mode fiber at 1310 nm wavelength with TE polarization. The spectral FWHM and backreflection are determined to be 58 nm and -27 dB, respectively.
ISSN:1539-4794
DOI:10.1364/OL.36.002101