In-line characterization of nanostructures produced by roll-to-roll nanoimprinting

We present an in-line metrology solution for dimensional characterization of roll-to-roll imprinted nanostructures. The solution is based on a scatterometric analysis of optical data from a hyperspectral camera deployed at a production facility, where nanostructures are produced at speeds of 10m/min...

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Bibliographic Details
Published inOptics express Vol. 29; no. 3; p. 3882
Main Authors Skovlund Madsen, Jonas, Geisler, Mathias, Berri Lotz, Mikkel, Zalkovskij, Maksim, Bilenberg, Brian, Korhonen, Raimo, Peltonen, Petri, Erik Hansen, Poul, Alkærsig Jensen, Søren
Format Journal Article
LanguageEnglish
Published United States 01.02.2021
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Summary:We present an in-line metrology solution for dimensional characterization of roll-to-roll imprinted nanostructures. The solution is based on a scatterometric analysis of optical data from a hyperspectral camera deployed at a production facility, where nanostructures are produced at speeds of 10m/min. The system combines the ease of use of a real-space imaging system with the spectral information used in scatterometry. We present nanoscale dimensional measurements on one-dimensional line gratings with various periods and orientations. The depths of the produced structures are accurately characterized with uncertainties on the scale of a few nanometers. The hyperspectral imaging capabilities of the system can also be used to avoid vibrational effects.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.411669