Synthesis of volatile inorganic hydrides by electrochemical method
Published data and results of our investigations on the problem of electrochemical synthesis of arsenic, phosphorus, and germanium hydrides are generalized. The results of the developments of the physicochemical bases of arsine synthesis by electrochemical reduction of arsenic acid, phosphine by red...
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Published in | Inorganic materials Vol. 46; no. 13; pp. 1459 - 1478 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
Dordrecht
SP MAIK Nauka/Interperiodica
01.12.2010
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Subjects | |
Online Access | Get full text |
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Summary: | Published data and results of our investigations on the problem of electrochemical synthesis of arsenic, phosphorus, and germanium hydrides are generalized. The results of the developments of the physicochemical bases of arsine synthesis by electrochemical reduction of arsenic acid, phosphine by reduction of white phosphorus in organic solvents, and monogermane by reduction of germanate in basic conditions are reported. The current yield of hydrides is 95, 90, and 40%, respectively. The promising guidelines of the practical use of electrochemical methods of the synthesis of the hydrides in the manufacture of semiconductor materials for microelectronics, optics, and laser engineering are discussed. The development of an arsine generator attracts considerable interest, which can serve as a basis for an aggregative continuous apparatus used in complex flow charts of manufacture of semiconductor materials. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 0020-1685 1608-3172 |
DOI: | 10.1134/S0020168510130042 |