ULV-SEM-EDX analysis of fine precipitates in Cr-Mo steel using windowless silicon-drift detector

Elemental analysis technique using a latest windowless silicon-drift detector (SDD) and ultra-low voltage scanningelectron microscope (ULV-SEM) have been applied to a Cr-Mo added steel containing several types of carbides andaluminum nitride. Low primary electron energy of around 1 keV reduces inter...

Full description

Saved in:
Bibliographic Details
Published inJournal of Surface Analysis Vol. 26; no. 2; pp. 206 - 207
Main Authors Nakamura, Takaya, Sato, Kaoru, Nagoshi, Masayasu
Format Journal Article
LanguageEnglish
Published Tokyo The Surface Analysis Society of Japan 2019
Surface Analysis Society of Japan
Subjects
Aluminum
Chemical precipitation
Chromium molybdenum steels
Drift
Electron energy
Electron microscopes
Low voltage
Precipitates
Scanning electron microscopy
Silicon steels
Spatial resolution
X ray analysis
Online AccessGet full text

Cover

More Information
Summary:Elemental analysis technique using a latest windowless silicon-drift detector (SDD) and ultra-low voltage scanningelectron microscope (ULV-SEM) have been applied to a Cr-Mo added steel containing several types of carbides andaluminum nitride. Low primary electron energy of around 1 keV reduces interaction volume and then provides remarkably high spatial resolution for x-ray analysis. We obtain elemental mappings of the precipitates with almost the same spatial resolution as ULV-SEM imaging.
ISSN:1341-1756
1347-8400
DOI:10.1384/jsa.26.206