Status of the growth and fabrication of AlGaN-based UV laser diodes for near and mid-UV wavelength

In this article, the development of mid-UV laser diodes based on the AlGaN materials system is reviewed. The targeted wavelength for these lasers covers the range from 200 to 350 nm. After introducing UV laser diodes and explaining their applications, the challenges in growth, design, and fabricatio...

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Published inJournal of materials research Vol. 36; no. 23; pp. 4638 - 4664
Main Authors Kirste, Ronny, Sarkar, Biplab, Reddy, Pramod, Guo, Qiang, Collazo, Ramon, Sitar, Zlatko
Format Journal Article
LanguageEnglish
Published Cham Springer International Publishing 14.12.2021
Springer Nature B.V
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Abstract In this article, the development of mid-UV laser diodes based on the AlGaN materials system is reviewed. The targeted wavelength for these lasers covers the range from 200 to 350 nm. After introducing UV laser diodes and explaining their applications, the challenges in growth, design, and fabrication are discussed. In addition, recent results from optically and electrically injected UV laser diodes are presented. Finally, we will discuss possible pathways to improve performance and give an outlook on the expected development of UV laser diodes in the near future. Graphical abstract
AbstractList In this article, the development of mid-UV laser diodes based on the AlGaN materials system is reviewed. The targeted wavelength for these lasers covers the range from 200 to 350 nm. After introducing UV laser diodes and explaining their applications, the challenges in growth, design, and fabrication are discussed. In addition, recent results from optically and electrically injected UV laser diodes are presented. Finally, we will discuss possible pathways to improve performance and give an outlook on the expected development of UV laser diodes in the near future.
In this article, the development of mid-UV laser diodes based on the AlGaN materials system is reviewed. The targeted wavelength for these lasers covers the range from 200 to 350 nm. After introducing UV laser diodes and explaining their applications, the challenges in growth, design, and fabrication are discussed. In addition, recent results from optically and electrically injected UV laser diodes are presented. Finally, we will discuss possible pathways to improve performance and give an outlook on the expected development of UV laser diodes in the near future. Graphical abstract
Author Sitar, Zlatko
Reddy, Pramod
Kirste, Ronny
Sarkar, Biplab
Collazo, Ramon
Guo, Qiang
Author_xml – sequence: 1
  givenname: Ronny
  surname: Kirste
  fullname: Kirste, Ronny
  email: rkirste@ncsu.edu
  organization: Department of Materials Science and Engineering, North Carolina State University, Adroit Materials
– sequence: 2
  givenname: Biplab
  surname: Sarkar
  fullname: Sarkar, Biplab
  organization: Department of Materials Science and Engineering, North Carolina State University, Department of Electronics and Communication Engineering, Indian Institute of Technology
– sequence: 3
  givenname: Pramod
  surname: Reddy
  fullname: Reddy, Pramod
  organization: Department of Materials Science and Engineering, North Carolina State University, Adroit Materials
– sequence: 4
  givenname: Qiang
  surname: Guo
  fullname: Guo, Qiang
  organization: Department of Materials Science and Engineering, North Carolina State University
– sequence: 5
  givenname: Ramon
  surname: Collazo
  fullname: Collazo, Ramon
  organization: Department of Materials Science and Engineering, North Carolina State University
– sequence: 6
  givenname: Zlatko
  surname: Sitar
  fullname: Sitar, Zlatko
  organization: Department of Materials Science and Engineering, North Carolina State University
BookMark eNp9kE1LAzEQhoNUsFb_gKeA52g-N8mxFK1C0YPWa8husu2W7aYmqcV_77YVBA89zcC8z8zwXIJBFzoPwA3Bd0QIeZ84E1IhTAnCmHOG1BkY0r5DgtFiAIZYKY6oJvwCXKa0wpgILPkQlG_Z5m2CoYZ56eEihl1eQts5WNsyNpXNTej203E7tS-otMk7OP-Abd9E6JrgfIJ1iLDzNh64deNQH9jZL9_6bpGXV-C8tm3y1791BOaPD--TJzR7nT5PxjNUMaIzqgVnkhVWeOk4kVVVakKclVpbJSTjpCpKXApfUs1dQSSl3mlacG2pVlJbNgK3x72bGD63PmWzCtvY9ScNlVhRhTUmfYoeU1UMKUVfm01s1jZ-G4LN3qU5ujS9S3NwaVQPqX9Q1eSDmhxt055G2RFN_Z1u4ePfVyeoH1WniUI
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ContentType Journal Article
Copyright The Author(s), under exclusive licence to The Materials Research Society 2021
The Author(s), under exclusive licence to The Materials Research Society 2021.
Copyright_xml – notice: The Author(s), under exclusive licence to The Materials Research Society 2021
– notice: The Author(s), under exclusive licence to The Materials Research Society 2021.
DBID AAYXX
CITATION
7SR
8BQ
8FD
JG9
DOI 10.1557/s43578-021-00443-8
DatabaseName CrossRef
Engineered Materials Abstracts
METADEX
Technology Research Database
Materials Research Database
DatabaseTitle CrossRef
Materials Research Database
Engineered Materials Abstracts
Technology Research Database
METADEX
DatabaseTitleList Materials Research Database

DeliveryMethod fulltext_linktorsrc
Discipline Engineering
Physics
EISSN 2044-5326
EndPage 4664
ExternalDocumentID 10_1557_s43578_021_00443_8
GrantInformation_xml – fundername: u.s. air force
  grantid: AFOSR (Nos. FA9550-17-1-0225; FA9550-19-1-0114)
  funderid: http://dx.doi.org/10.13039/100006831
– fundername: u.s. department of energy
  grantid: DE-SC0011883
  funderid: http://dx.doi.org/10.13039/100000015
– fundername: national science foundation
  grantid: ECCS-1508854; ECCS-1610992; DMR-1508191; ECCS-1653383
  funderid: http://dx.doi.org/10.13039/100000001
– fundername: u.s. army
  grantid: ARO (Nos. W911NF-15-2-0068; W911NF-16-C-0101)
  funderid: http://dx.doi.org/10.13039/100006751
GroupedDBID -E.
-~X
.DC
.FH
0E1
0R~
2JN
4.4
406
5GY
5VS
74X
74Y
7WY
7~V
8FE
8FG
8UJ
8WZ
A6W
AAAZR
AACDK
AACJH
AAGFV
AAHNG
AAIKC
AAJBT
AAKTX
AAMNW
AARAB
AASML
AATNV
ABAKF
ABBXD
ABECU
ABEFU
ABGDZ
ABJNI
ABKKG
ABMQK
ABQTM
ABROB
ABTEG
ABTKH
ABTMW
ABZCX
ACAOD
ACBEA
ACBEK
ACBMC
ACDTI
ACGFO
ACGFS
ACHSB
ACIHN
ACIMK
ACIWK
ACPIV
ACUIJ
ACXSD
ACZBM
ACZOJ
ACZUX
ADCGK
ADFEC
AEAQA
AEFQL
AEMSY
AEMTW
AENEX
AESKC
AEYYC
AFBBN
AFFUJ
AFKRA
AFLOS
AFLVW
AFUTZ
AGMZJ
AGQEE
AIGIU
AISIE
AJPFC
AJQAS
ALMA_UNASSIGNED_HOLDINGS
ALWZO
AMTXH
AMXSW
AMYLF
ARABE
ATUCA
BBLKV
BENPR
BEZIV
BGHMG
BGLVJ
BMAJL
BPHCQ
C0O
CS3
CZ9
D1I
DC4
DOHLZ
DPUIP
DU5
EBLON
EBS
F5P
FIGPU
HG-
HST
HZ~
I.6
I.9
IH6
IKXTQ
IS6
IWAJR
I~P
J36
J38
J3A
JHPGK
JKPOH
JZLTJ
K60
K6~
KB.
KC.
L98
LLZTM
M-V
M0C
NIKVX
NPVJJ
NQJWS
O9-
P2P
PQBIZ
PQQKQ
PROAC
PYCCK
RAMDC
RCA
RNS
ROL
RR0
RSV
S0W
S6-
S6U
SJN
SJYHP
SNE
SNPRN
SOHCF
SOJ
SRMVM
SSLCW
T9M
TAE
TN5
TWZ
UPT
UT1
WH7
WQ3
WXU
YQT
~02
AAYXX
ABBRH
ABDBE
ABFSG
ACMFV
ACSTC
AEZWR
AFDZB
AFHIU
AFOHR
AHPBZ
AHWEU
AIXLP
ATHPR
AYFIA
CITATION
7SR
8BQ
8FD
ABRTQ
HCIFZ
JG9
PDBOC
ID FETCH-LOGICAL-c319t-f543736a5e7d417ccb911da799a857341c6b0b5eb294d61722ed92649a29879a3
ISSN 0884-2914
IngestDate Wed Aug 13 10:48:30 EDT 2025
Tue Jul 01 03:46:08 EDT 2025
Thu Apr 24 23:02:43 EDT 2025
Fri Feb 21 02:46:27 EST 2025
IsPeerReviewed true
IsScholarly true
Issue 23
Keywords Dopant
Optoelectronic
Electrical properties
Optical properties
Laser
Language English
LinkModel OpenURL
MergedId FETCHMERGED-LOGICAL-c319t-f543736a5e7d417ccb911da799a857341c6b0b5eb294d61722ed92649a29879a3
Notes ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 14
PQID 2708280901
PQPubID 626330
PageCount 27
ParticipantIDs proquest_journals_2708280901
crossref_primary_10_1557_s43578_021_00443_8
crossref_citationtrail_10_1557_s43578_021_00443_8
springer_journals_10_1557_s43578_021_00443_8
ProviderPackageCode CITATION
AAYXX
PublicationCentury 2000
PublicationDate 20211214
PublicationDateYYYYMMDD 2021-12-14
PublicationDate_xml – month: 12
  year: 2021
  text: 20211214
  day: 14
PublicationDecade 2020
PublicationPlace Cham
PublicationPlace_xml – name: Cham
– name: Warrendale
PublicationTitle Journal of materials research
PublicationTitleAbbrev Journal of Materials Research
PublicationYear 2021
Publisher Springer International Publishing
Springer Nature B.V
Publisher_xml – name: Springer International Publishing
– name: Springer Nature B.V
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SSID ssj0015074
Score 2.4875584
SecondaryResourceType review_article
Snippet In this article, the development of mid-UV laser diodes based on the AlGaN materials system is reviewed. The targeted wavelength for these lasers covers the...
SourceID proquest
crossref
springer
SourceType Aggregation Database
Enrichment Source
Index Database
Publisher
StartPage 4638
SubjectTerms Applied and Technical Physics
Biomaterials
Chemistry and Materials Science
Diodes
Inorganic Chemistry
Invited Feature Paper-Review
Materials Engineering
Materials research
Materials Science
Nanotechnology
Semiconductor lasers
Ultraviolet lasers
Title Status of the growth and fabrication of AlGaN-based UV laser diodes for near and mid-UV wavelength
URI https://link.springer.com/article/10.1557/s43578-021-00443-8
https://www.proquest.com/docview/2708280901
Volume 36
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1bb9MwFLa6TUjwgGCA6BiTH3gLhjaxk_hxRXQTiArEOu0tsmOnVGzp1KaaxG_iR3J8yWWXIsZLVCXHadLz9fjz8fFnhN5EjOcxQAWiH6eEpgNFUhiDESbCWOUFcFi7wvvLJD6e0k9n7KzX-92pWlpX8l3-6851Jf_jVTgHfjWrZO_h2eamcAI-g3_hCB6G4z_52DDF9aqe5p_BiNovVCuEXPpknKWa50diQkyHpYLpaQCE2ewLPl8obdUYgtKo-Zh2F3NFwOBKmO0oyln1YwN3BZrr3i_wYkFNUvnzHOikdjXbZdnk67-L5U9Xyj2aXwLwmnkerVyU_7oUFwvVVAOtbQb3G2B31s1LhENT4zG8nZe8kdlsk2vXAh0lIfeNtT0XDiglLHKr6etI7aRSPCLDqBN3aew0YnwfbjTz7-wfmN3UeEWNxg8xD20mtCOStr1hU6NoRkdgnjnjDIwza5ylW2gnhEEJRNWdw_FoNGlmrYBbUzdqce_jF2nBXd7f_srrRKgd3dyYkLc85-QJeuydjA8d2p6ini530aOObOUuemDLhvPVMyQdAvGiwIBA7BCIAUm4g0BztYNAPD3FFoHYIRADArFBoG3nEIhbBD5H0_HHkw_HxO_aQXII5xUpmFHLigXTiaLDJM8l9KdKJJyLlCVAmvJYDiTTMuRUGf4casWBlnMR8jThInqBtstFqV8izLSRJoIHjgaaKqlkVERK0kipnIJt0UfD-ifMci9pb3ZWOc82O6-PgqbNpRN0-av1fu2ZzP_xV1mYGN3HATDpPnpbe6u9vPlue_czf4Uetn-sfbRdLdf6NVDgSh6grXR8dODx9weLBKtr
linkProvider Library Specific Holdings
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Status+of+the+growth+and+fabrication+of+AlGaN-based+UV+laser+diodes+for+near+and+mid-UV+wavelength&rft.jtitle=Journal+of+materials+research&rft.au=Kirste%2C+Ronny&rft.au=Sarkar%2C+Biplab&rft.au=Reddy%2C+Pramod&rft.au=Guo%2C+Qiang&rft.date=2021-12-14&rft.pub=Springer+International+Publishing&rft.issn=0884-2914&rft.eissn=2044-5326&rft.volume=36&rft.issue=23&rft.spage=4638&rft.epage=4664&rft_id=info:doi/10.1557%2Fs43578-021-00443-8&rft.externalDocID=10_1557_s43578_021_00443_8
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0884-2914&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0884-2914&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0884-2914&client=summon