Numerical Investigation on Effect of Side Heater Modification on the Stress Distribution and Dislocation Density of Multi-Crystalline Silicon Ingot Grown by DS Process

A transient global numerical simulation is adopted to develop a high quality multi-crystalline silicon (mc-Si) ingot using directional solidification (DS) furnace. The geometry of the simulation furnace is based on the G1 DS furnace. In this simulation, the modification is done on the side heaters w...

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Bibliographic Details
Published inSILICON Vol. 15; no. 18; pp. 7755 - 7764
Main Authors Muthukumar, R., Aravinth, K., Bhargav, P. Balaji, Ramasamy, P.
Format Journal Article
LanguageEnglish
Published Dordrecht Springer Netherlands 01.12.2023
Springer Nature B.V
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Summary:A transient global numerical simulation is adopted to develop a high quality multi-crystalline silicon (mc-Si) ingot using directional solidification (DS) furnace. The geometry of the simulation furnace is based on the G1 DS furnace. In this simulation, the modification is done on the side heaters wherein each heater group has different temperature profile. The thermal field is investigated during and after solidification process. The thermoelastic stress model is solved for the stress distribution in the mc-Si ingot. The modified heater system results in the reduction of thermal stress up to 8.3 × 10 3 Mpa and the reduction of dislocation up to 4.0 × 10 5 [1/m 2 ]. Also, the melt crystal interface, temperature distribution and power profile are investigated. From the heater modification system will be reduce the thermal stress and dislocation density in the grown ingot.
ISSN:1876-990X
1876-9918
DOI:10.1007/s12633-023-02614-0