Fabrication of silicon-based multilevel nanostructures via scanning probe oxidation and anisotropic wet etching

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Bibliographic Details
Published inNanotechnology Vol. 16; no. 4; pp. 422 - 428
Main Authors Zhang, Y Y, Zhang, J, Luo, G, Zhou, X, Xie, G Y, Zhu, T, Liu, Z F
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.04.2005
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ISSN:0957-4484
1361-6528
DOI:10.1088/0957-4484/16/4/015