Preparation of magnetron sputtered TiNxOy thin films
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Published in | Surface & coatings technology Vol. 174-175; pp. 197 - 203 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
01.09.2003
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Online Access | Get full text |
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ISSN: | 0257-8972 |
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DOI: | 10.1016/S0257-8972(03)00416-X |