Design and fabrication of a terminating type MEMS microwave power sensor

A terminating type MEMS microwave power sensor based on the Seebeck effect and compatible with the GaAs MMIC process is presented. An electrothermal model is introduced to simulate the heat transfer behavior and temperature distribution. The sensor measured the microwave power from –20 to 20 dBm up...

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Bibliographic Details
Published inJournal of semiconductors Vol. 30; no. 4; pp. 59 - 62
Main Author 许映林 廖小平
Format Journal Article
LanguageChinese
English
Published IOP Publishing 01.04.2009
Subjects
MEMS
共面波导
制作
功率传感器
塞贝克效应
微波功率
设计
高灵敏度
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Summary:A terminating type MEMS microwave power sensor based on the Seebeck effect and compatible with the GaAs MMIC process is presented. An electrothermal model is introduced to simulate the heat transfer behavior and temperature distribution. The sensor measured the microwave power from –20 to 20 dBm up to 20 GHz. The sensitivity of the sensor is 0.27 mV/mW at 20 GHz, and the input return loss is less than –26 dB over the entire experiment frequency range. In order to improve the sensitivity, four different types of coplanar waveguide （CPW） were designed and the sensitivity was significantly increased by about a factor of 2.
Bibliography:MEMS; MMIC; microwave power; return loss; sensitivity
TP212
TN814
MEMS
sensitivity
11-5781/TN
microwave power
return loss
MMIC
ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:1674-4926
DOI:10.1088/1674-4926/30/4/044010