Influence of Surface State on Biochemical Sensing Using SiGe Nanowire

Nanowires are extensively used to fabricate highly sensitive electrical sensors for detection of biological and chemical species. The hole mobility can be promoted by the increasing Ge fraction in SiGe, achieved by the oxidation-induced Ge condensation. However, oxidation increases the number of sur...

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Published inIEEE transactions on nanobioscience Vol. 14; no. 4; pp. 334 - 338
Main Authors Chiung-Hui Lai, Kow-Ming Chang, Yi-Ming Chen, Chu-Feng Chen, Po-Shen Kuo, Tai-Yuan Chang, Whang, Allen Jong-Woei, Yi-Lung Lai, Shiu-Yu Wang
Format Magazine Article
LanguageEnglish
Published United States IEEE 01.06.2015
Subjects
Biosensors
Nanobioscience
Oxidation
Plasmas
Sensitivity
SiGe nanowire
Silicon
Silicon germanium
surface state
Surface treatment
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Summary:Nanowires are extensively used to fabricate highly sensitive electrical sensors for detection of biological and chemical species. The hole mobility can be promoted by the increasing Ge fraction in SiGe, achieved by the oxidation-induced Ge condensation. However, oxidation increases the number of surface states, which brings the nonnegligible contribution in mobility degradation. In this work, 3-aminopropyltrimethoxysilane (APTMS) was used as a biochemical reagent to modify the surface of SiGe nanowires, then bonding to bio-linker, bis (3-sulfo-N-hydroxysuccinimide ester) sodium salt (BS3). Various methods have been proposed for increasing sensitivity of boron-doped SiGe nanowires, such as capping layer, surface treatment, and annealing temperature.
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ISSN:1536-1241
1558-2639
DOI:10.1109/TNB.2015.2407912