Averaged power spectrum density, fractal and multifractal spectra of Au nano-particles deposited onto annealed TiO2 thin films

• Published in: Optical and quantum electronics Vol. 52; no. 11
• Main Authors: Solaymani, Shahram, Yadav, Ram Pratap, Ţălu, Ştefan, Achour, Amine, Rezaee, Sahar, Nezafat, Negin Beryani
• Format: Journal Article
• Language: English
• Published: New York Springer US 01.11.2020; Springer Nature B.V
• Subjects: Atomic force microscopy; Characterization and Evaluation of Materials; Computer Communication Networks; Electrical Engineering; Gold; Lasers; Magnetron sputtering; Morphology; Nanoparticles; Optical Devices; Optics; Photonics; Physics; Physics and Astronomy; Room temperature; Surface properties; Thin films; Titanium dioxide; Titanium oxides; Topography; Atomic force microscopy; Gold nano particles; TiO; Multifractal analysis; Stereometric analysis; thin films
• ISSN: 0306-8919; 1572-817X
• DOI: 10.1007/s11082-020-02584-2

This work describes the morphology of titanium oxide (TiO 2 ) thin films deposited by gold nanoparticles and produced at room temperature over Si(100) wafers. A direct-current (DC) reactive magnetron sputtering process was applied for the sample preparation. Then, their three-dimensional (3-D) surface characterization was carried out by using atomic force microscopy (AFM). Stereometric analysis was carrying out on the basis of AFM-data, and the surface topography was described according to ISO 25,178–2:2012 standard. As can be seen, the surface of sample #3 has the most regular topography (Df = 2.70 ± 0.01) with the most regular surface (Sq = 0.97 nm). The most irregular topography (Df = 2.83 ± 0.01) was found in sample #2, while the most irregular surface (Sq = 3.38 nm) was found in sample #1.