On-chip hybrid erbium-doped tellurium oxide–silicon nitride distributed Bragg reflector lasers
We demonstrate integrated on-chip erbium-doped tellurite (TeO 2 :Er 3+ ) waveguide lasers fabricated on a wafer-scale silicon nitride platform. A 0.352-µm-thick TeO 2 :Er 3+ coating was deposited as an active medium on 0.2-µm-thick, 1.2- and 1.6-µm-wide, and 22-mm-long silicon nitride waveguides wit...
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Published in | Applied physics. B, Lasers and optics Vol. 129; no. 10 |
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Main Authors | , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Berlin/Heidelberg
Springer Berlin Heidelberg
01.10.2023
Springer Nature B.V |
Subjects | |
Online Access | Get full text |
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Summary: | We demonstrate integrated on-chip erbium-doped tellurite (TeO
2
:Er
3+
) waveguide lasers fabricated on a wafer-scale silicon nitride platform. A 0.352-µm-thick TeO
2
:Er
3+
coating was deposited as an active medium on 0.2-µm-thick, 1.2- and 1.6-µm-wide, and 22-mm-long silicon nitride waveguides with sidewall-patterned asymmetrical distributed Bragg reflector cavities. The lasers yield efficiencies between 0.06 and 0.36%, lasing threshold ranging from 13 to 26 mW, and emission within the C-band (1530–1565 nm). These results establish new opportunities for this hybrid tellurite glass–silicon nitride platform, such as the co-integration of passive components and light sources in the telecom window, and provide the foundation for the development of efficient, compact, and high-output-power on-chip erbium-doped tellurite waveguide lasers. |
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ISSN: | 0946-2171 1432-0649 |
DOI: | 10.1007/s00340-023-08099-4 |