Modeling, optimization and performance of high-Q MEMS solenoid inductors

• Published in: Microsystem technologies : sensors, actuators, systems integration Vol. 14; no. 2; pp. 185 - 191
• Main Authors: Fang, Dong-Ming, Zhou, Yong, Jing, Xiang-Meng, Zhao, Xiao-Lin, Wang, Xi-Ning
• Format: Journal Article
• Language: English
• Published: Berlin/Heidelberg Springer-Verlag 01.02.2008; Springer
• Subjects: Applied sciences; Electronics; Electronics and Microelectronics; Engineering; Exact sciences and technology; Instrumentation; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical Engineering; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Microelectronic fabrication (materials and surfaces technology); Micromechanical devices and systems; Nanotechnology; Physics; Precision engineering, watch making; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Technical Paper; Mutual Inductance; Conductor Line; Spiral Inductor; Parasitic Capacitance; Parallel Conductor; GHz range; High performance; Minimization; System on a chip; Inductors; Solenoids; Optimization; Inductance; Quality factor; Resonance frequency; Size effect; Modelling; Microelectromechanical device; Equivalent circuits
• ISSN: 0946-7076; 1432-1858
• DOI: 10.1007/s00542-007-0421-2

Modeling, optimization and performance of on-chip solenoid inductors is presented. MATLAB is used to get the π -equivalent circuit model parameters. The effects of the geometrical parameters on the inductance and quality factor ( Q -factor) are different. Normally, the performance of the inductors can be improved by increasing the coil turns in a way and increasing the length of the conductor, but both of them will occupy more chip area, which is not good for the minimization of the on-chip system. It is desirable to improve the performance of inductor by increasing the height of the via. Of the three types of fabricated inductors covering the same area, the inductors with the height of via 15, 30 and 45 μm have high performance. The self-resonant frequency is up to 10 GHz. The inductances and Q -factors at peak- Q frequency (about 5.8 GHz) are 1.16, 1.35, 1.78 nH and 21.9, 27, 38, respectively.