Computational modeling of forced flow laser chemical vapor deposition

Laser chemical vapor deposition (LCVD) utilizes a laser to localize a CVD reaction. The process involves complex physical interactions within a very small spatial region. Experimental investigations into the dynamics of the LCVD process are limited by spatial and resolution capabilities of instrumen...

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Bibliographic Details
Published inApplied physics. A, Materials science & processing Vol. 90; no. 2; pp. 333 - 345
Main Authors Johnson, R.W., Duty, C.E., Fedorov, A.G., Lackey, W.J.
Format Journal Article
LanguageEnglish
Published Berlin/Heidelberg Springer-Verlag 01.02.2008
Springer
Subjects
Characterization and Evaluation of Materials
Condensed Matter Physics
Cross-disciplinary physics: materials science; rheology
Exact sciences and technology
Machines
Manufacturing
Materials science
Methods of deposition of films and coatings; film growth and epitaxy
Nanotechnology
Optical and Electronic Materials
Physics
Physics and Astronomy
Processes
Surfaces and Interfaces
Thin Films
Deposition Rate
Laser Power
Thermal Diffusion
Laser Spot
Chemical Vapor Deposition Reaction
CVD
Computational fluid dynamics
Laser deposition
Heat flow
Modelling
Deposition rate
Carbon
Spatial resolution
Forced flow
Heat transfer
Deposition process
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Summary:Laser chemical vapor deposition (LCVD) utilizes a laser to localize a CVD reaction. The process involves complex physical interactions within a very small spatial region. Experimental investigations into the dynamics of the LCVD process are limited by spatial and resolution capabilities of instrumentation. Models are developed herein using the computational fluid dynamics (CFD) code, FLUENT, that incorporate heat transfer, fluid flow, and species transport in a single integrated modeling environment. The models are used to study the carbon deposition process. Insight is gained into the relationships among the process parameters and the deposition rates and deposition rate profiles. Phenomena such as thermal diffusion and the relative importance of mass convection and mass diffusion are explored. A designed set of model cases is executed and the results are used to develop a simple polynomial expression for relating experiment conditions to deposit attributes.
ISSN:0947-8396
1432-0630
DOI:10.1007/s00339-007-4278-0