Note: micro-cantilevers with AlN actuators and PtSi tips for multi-frequency atomic force microscopy

We report the design, fabrication, and characterization of cantilevers with integrated AlN actuators and conductive PtSi tips for multi-frequency atomic force microscopy. These cantilevers also possess a stepped-rectangular geometry. The excellent dynamic behavior of these cantilevers is investigate...

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Bibliographic Details
Published inReview of scientific instruments Vol. 83; no. 9; p. 096107
Main Authors Sebastian, Abu, Shamsudhin, Naveen, Rothuizen, Hugo, Drechsler, Ute, Koelmans, Wabe W, Bhaskaran, Harish, Quenzer, Hans Joachim, Wagner, Bernhard, Despont, Michel
Format Journal Article
LanguageEnglish
Published United States 01.09.2012
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Summary:We report the design, fabrication, and characterization of cantilevers with integrated AlN actuators and conductive PtSi tips for multi-frequency atomic force microscopy. These cantilevers also possess a stepped-rectangular geometry. The excellent dynamic behavior of these cantilevers is investigated using both finite-element simulations and experimental methods. Several imaging experiments are presented to illustrate the efficacy and versatility of these cantilevers.
ISSN:1089-7623
DOI:10.1063/1.4755749