Laser interference patterning methods: Possibilities for high-throughput fabrication of periodic surface patterns

Fabrication of two- and three-dimensional (2D and 3D) structures in the micro- and nano-range allows a new degree of freedom to the design of materials by tailoring desired material properties and, thus, obtaining a superior functionality. Such complex designs are only possible using novel fabricati...

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Bibliographic Details
Published inAdvanced optical technologies Vol. 6; no. 3; pp. 265 - 275
Main Author Lasagni, Andrés Fabián
Format Journal Article
LanguageEnglish
Published Berlin De Gruyter 27.06.2017
Walter de Gruyter GmbH
Subjects
Arrays
direct laser interference patterning
High resolution
Interference
Interferometry
Irradiation
Laser beams
laser interference
laser interference lithography
Lasers
Mathematical analysis
Patterning
periodic structures formation
Photoresists
Polarization
surface functionalization
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Summary:Fabrication of two- and three-dimensional (2D and 3D) structures in the micro- and nano-range allows a new degree of freedom to the design of materials by tailoring desired material properties and, thus, obtaining a superior functionality. Such complex designs are only possible using novel fabrication techniques with high resolution, even in the nanoscale range. Starting from a simple concept, transferring the shape of an interference pattern directly to the surface of a material, laser interferometric processing methods have been continuously developed. These methods enable the fabrication of repetitive periodic arrays and microstructures by irradiation of the sample surface with coherent beams of light. This article describes the capabilities of laser interference lithographic methods for the treatment of both photoresists and solid materials. Theoretical calculations are used to calculate the intensity distributions of patterns that can be realized by changing the number of interfering laser beams, their polarization, intensity and phase. Finally, different processing systems and configurations are described and, thus, demonstrating the possibility for the fast and precise tailoring of material surface microstructures and topographies on industrial relevant scales as well as several application cases for both methods.
ISSN:2192-8576
2192-8584
DOI:10.1515/aot-2017-0016