On the tunability of a MEMS based variable capacitor with a novel structure

• Published in: Microsystem technologies : sensors, actuators, systems integration Vol. 17; no. 9; pp. 1447 - 1452
• Main Authors: Mobki, Hamed, Sadeghi, Morteza H., Afrang, Saeid, Rezazadeh, Ghader
• Format: Journal Article
• Language: English
• Published: Berlin/Heidelberg Springer-Verlag 01.09.2011; Springer
• Subjects: Applied sciences; Electronics; Electronics and Microelectronics; Engineering; Exact sciences and technology; Instrumentation; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical Engineering; Mechanical instruments, equipment and techniques; Micro- and nanoelectromechanical devices (mems/nems); Micromechanical devices and systems; Nanotechnology; Physics; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Technical Paper; Threshold Voltage; Tuning Range; Saddle Node Bifurcation; Center Conductor; Applied Voltage; Variable capacitor; Pull in voltage; Capacitive transducer; Capacitance; Bernoulli Euler model; Boundary condition; Non linear effect; Modeling; Microelectromechanical device; Cantilever beam; Threshold
• ISSN: 0946-7076; 1432-1858
• DOI: 10.1007/s00542-011-1327-6

In this work a novel MEMS based variable capacitor has been presented. To increase the tunability and decrease the applied voltage, the conventional fixed-fixed beam used in CPW lines has been changed to a fixed-simple supported beam. The proposed structure is a simple cantilever micro-beam in the first step of deflection and is changed to a fixed-simple supported micro-beam in the second step of motion. In the capacitive micro-structures increasing the applied voltage decreases the equivalent stiffness of the structure and leads the system to an unstable condition by undergoing to a saddle node bifurcation. In the proposed structure to avoid pull-in instability and increase the capacitance tuning range, mechanical stiffness of the structure is increased by changing boundary conditions by locating a pedestal in the end of the cantilever beam. The governing nonlinear equation for static deflection of the micro-beam, based on Euler–Bernoulli micro-beam theory has been presented. The results show that the proposed structure increases the capacitance tuning range and decreases the applied voltage. The results also show that the position of the pedestal affects the tunability and the threshold voltage of the structure.