Characterization of RuO2 and IrO2 films deposited on Si substrate

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Bibliographic Details
Published inJournal of alloys and compounds Vol. 317-318; pp. 98 - 102
Main Authors Liao, P.C., Huang, Y.S., Tiong, K.K.
Format Journal Article
LanguageEnglish
Published 12.04.2001
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ISSN:0925-8388
DOI:10.1016/S0925-8388(00)01403-1