Electrical and structural properties of surfaces and interfaces in Ti/Al/Ni Ohmic contacts to p-type implanted 4H-SiC

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Bibliographic Details
Published inApplied surface science Vol. 420; pp. 331 - 335
Main Authors Vivona, M., Greco, G., Bongiorno, C., Lo Nigro, R., Scalese, S., Roccaforte, F.
Format Journal Article
LanguageEnglish
Published 31.10.2017
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ISSN:0169-4332
DOI:10.1016/j.apsusc.2017.05.065