Characteristics of Multilayer Piezoelectric Actuator Made of High Q Material for Application to Ultrasonic Linear Motor

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 41; no. Part 1, No. 11B; pp. 7144 - 7148
Main Authors Funakubo, Tomoki, Tomikawa, Yoshiro
Format Journal Article
LanguageEnglish
Published 01.11.2002
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.41.7144