Fabricating Master with Reactive Ion Beam Etching Method
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Published in | Chinese physics letters Vol. 15; no. 7; pp. 495 - 497 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
IOP Publishing
01.07.1998
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Online Access | Get full text |
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ISSN: | 0256-307X 1741-3540 |
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DOI: | 10.1088/0256-307X/15/7/010 |