Characterisation of mirror-polished Si wafers and advanced Si substrate structures using the magic mirror method

Saved in:
Bibliographic Details
Published inSemiconductor science and technology Vol. 7; no. 1A; pp. A80 - A85
Main Authors Hahn, S, Kugimiya, K, Vojtechovsky, K, Sifalda, M, Yamashita, M, Blaustein, P R, Takahashi, K
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.01.1992
Online AccessGet full text

Cover

More Information
ISSN:0268-1242
1361-6641
DOI:10.1088/0268-1242/7/1A/015