Microstructural control of diamond thin films by microlithographic patterning

Microlithographic patterning has been used to elucidate the mechanisms controlling diamond film nucleation and grain growth. The approach is capable of establishing a degree of control over diamond nucleation on the substrate, which can be used to improve film uniformity and enhance fine grained mic...

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Bibliographic Details
Published inJournal of applied physics Vol. 68; no. 8; pp. 4014 - 4019
Main Authors DENATALE, J. F, FLINTOFF, J. F, HARKER, A. B
Format Journal Article
LanguageEnglish
Published Woodbury, NY American Institute of Physics 1990
Subjects
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Solid surfaces and solid-solid interfaces
Surface and interface dynamics and vibrations
Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
Non metal
Plasma
Grain growth
Support
Lithography
Crystallization
Diamond
Twinning
Crystal defect
Experimental study
Chemical vapor deposition
Thin film
Surface
Morphology
Growth mechanism
Crystal nucleation
Microstructure
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Summary:Microlithographic patterning has been used to elucidate the mechanisms controlling diamond film nucleation and grain growth. The approach is capable of establishing a degree of control over diamond nucleation on the substrate, which can be used to improve film uniformity and enhance fine grained microstructure. The observed microstructures in the patterned films are consistent with an intrinsic growth mechanism based upon defect-initiated renucleation.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0021-8979
1089-7550
DOI:10.1063/1.346237