Space-resolved velocity and flux distributions of sputtered Ti atoms in a planar circular magnetron discharge
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Published in | Plasma sources science & technology Vol. 20; no. 4; p. 45020 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
Bristol
Institute of Physics
01.08.2011
IOP Publishing |
Subjects | |
Online Access | Get full text |
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ISSN: | 0963-0252 1361-6595 |
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DOI: | 10.1088/0963-0252/20/4/045020 |