AFM study of a SiC film grown on Si(1 0 0) surface using a C2H4 beam

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Bibliographic Details
Published inApplied surface science Vol. 169-170; pp. 300 - 304
Main Authors Takami, T., Igari, Y., Abe, I., Ishidzuka, S., Kusunoki, I.
Format Journal Article
LanguageEnglish
Published 15.01.2001
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ISSN:0169-4332
DOI:10.1016/S0169-4332(00)00678-4