Measurement of hydrogen content in ultrathin diamond-like carbon films using low-energy elastic recoil detection analysis

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Bibliographic Details
Published inDiamond and related materials Vol. 9; no. 3-6; pp. 746 - 751
Main Authors Konishi, Y., Ogura, S., Ikuchi, N., Imai, D., Nishihara, T., Shinohara, M.
Format Journal Article
LanguageEnglish
Published 01.04.2000
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ISSN:0925-9635
DOI:10.1016/S0925-9635(99)00287-3