Soft x-ray lithography using radiation from laser-produced plasmas

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Bibliographic Details
Published inApplied optics (2004) Vol. 24; no. 13; p. 2024
Main Authors Gohil, P, Kapoor, H, Ma, D, Pekerar, M C, McIlrath, T J, Ginter, M L
Format Journal Article
LanguageEnglish
Published United States 01.07.1985
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ISSN:1559-128X
DOI:10.1364/AO.24.002024