Sapphire orientation dependence of the microstructure of ZnO thin film during annealing

• Published in: Journal of electroceramics Vol. 17; no. 2-4; pp. 231 - 234
• Main Authors: TAE SIK CHO, YI, Min-Su, JI WOOK JEUNG, DO YOUNG NOH, JIN WOO KIM, JUNG HO JE
• Format: Conference Proceeding Journal Article
• Language: English
• Published: Heidelberg Springer 01.12.2006; Springer Nature B.V
• Subjects: Annealing; Condensed matter: structure, mechanical and thermal properties; Crystals; Exact sciences and technology; Grains; Microstructure; Orientation; Physics; Radio frequency; Sapphire; Structure and morphology; thickness; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology; Thin films; Zinc oxide; Annealing; Inorganic compounds; Crystal orientation; Oxides; Synchrotron X-ray scattering; Experimental study; Substrates; Orientation relation; Thin films; Magnetrons; Zinc oxides; X-ray scattering; Sapphire; Sapphire orientation; Microstructure; Thermal annealing; Radiofrequency sputtering; Synchrotron radiation; ZnO thin film
• ISSN: 1385-3449; 1573-8663
• DOI: 10.1007/s10832-006-6994-9

Issue Title: Special Issue: ICE-2005 International Conference on Electroceramics The sapphire orientation dependence of the microstructure of ZnO thin films has been studied in real-time synchrotron X-ray scattering experiments. The ZnO films with a 2400-Å-thick were grown on sapphire (001) and sapphire (110) substrates at room temperature by radio frequency magnetron sputtering. The as-deposited ZnO film on sapphire (001) has the only (002) crystal grains, while that on sapphire (110) has not only (002) crystal grains but (100) and (101) additional grains. The ZnO films were changed into fully epitaxial ZnO (002) grains both on sapphire (001) and sapphire (110) substrates with increasing the annealing temperature to 600^sup ^C. The epitaxial relationships of the ZnO grains were summarized as ZnO (00l)[100]//sapphire (00l)[110] and ZnO (00l)[110]//sapphire (110)[001].[PUBLICATION ABSTRACT]