Chemical Nanolithography with Electron Beams

Saved in:

Bibliographic Details
Published in	Advanced materials (Weinheim) Vol. 13; no. 11; pp. 806 - 809
Main Authors	Gölzhäuser, A., Eck, W., Geyer, W., Stadler, V., Weimann, T., Hinze, P., Grunze, M.
Format	Journal Article
Language	English
Published	05.06.2001
Online Access	Get full text

Loading…

More Information
ISSN:	0935-9648 1521-4095
DOI:	10.1002/1521-4095(200106)13:11%3C803::AID-ADMA806%3E3.0.CO;2-W