Influence of Nitrogen on the Microstructure, Hardness, and Tribological Properties of Cr–Ni–B–C–N Films Deposited by DC Magnetron Sputtering

Using the direct current reaction magnetron sputtering technique, Cr–Ni–B–C–N films are deposited onto silicon substrates by sputtering Cr–Ni and B–C targets in an Ar/N 2 gas mixture. The microstructure, chemical bonds, hardness, and tribological properties of the films are characterized using the X...

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Bibliographic Details
Published inJournal of superhard materials Vol. 42; no. 2; pp. 68 - 77
Main Authors Onoprienko, A. A., Ivashchenko, V. I., Scrynskyy, P. L., Sinelnichenko, A. K., Kozak, A. A., Kovalchenko, A. M., Olifan, E. I.
Format Journal Article
LanguageEnglish
Published Moscow Pleiades Publishing 01.03.2020
Springer Nature B.V
Subjects
Boron oxides
Chemical bonds
Chemistry
Chemistry and Materials Science
Chromium nitride
Direct current
Flow velocity
Gas mixtures
Hardness
Magnetron sputtering
Mechanical properties
Microhardness
Microstructure
Nitrogen
Photoelectrons
Physical Chemistry
Properties
Silicon substrates
Structure
Synthesis
Tribology
X ray photoelectron spectroscopy
magnetron sputtering
nanocomposite
structure
mechanical properties
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Summary:Using the direct current reaction magnetron sputtering technique, Cr–Ni–B–C–N films are deposited onto silicon substrates by sputtering Cr–Ni and B–C targets in an Ar/N 2 gas mixture. The microstructure, chemical bonds, hardness, and tribological properties of the films are characterized using the X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) methods, and microindentation and tribological tests. The experimental results show that the microstructure and properties of the films change upon incorporation of nitrogen into the film composition. The Cr–Ni–B–C–N films are mainly composed of the nanocrystalline CrN phase with some fractions of the Ni, Cr 2 O 3 , and B 2 O 3 crystalline phases embedded in a mixed amorphous environment. Addition of nitrogen gives rise to an increase in the film hardness to a maximum value of about 17 GPa at F N2 = 40 cm 3 /min, and then the hardness sharply decrease with a further increase in the F N2 flow rate. The incorporation of nitrogen into the structure of films improves their tribological and adhesion properties.
ISSN:1063-4576
1934-9408
DOI:10.3103/S1063457620020069