Influence of an External Circuit on the Plasma Parameters in the Channel of the Radio-Frequency Accelerator with a Closed Electron Drift

The axial distribution of the plasma potential, electron density and temperature in a capacitive RF plasma source with the geometry of an accelerator with a closed electron drift is studied experimentally. Two cases of the external electrical discharge circuit are considered. In the first case, the...

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Bibliographic Details
Published inPlasma physics reports Vol. 47; no. 10; pp. 1075 - 1079
Main Authors Shvydky, G. V., Zadiriev, I. I., Kralkina, E. A., Vavilin, K. V.
Format Journal Article
LanguageEnglish
Published Moscow Pleiades Publishing 01.10.2021
Springer Nature B.V
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Summary:The axial distribution of the plasma potential, electron density and temperature in a capacitive RF plasma source with the geometry of an accelerator with a closed electron drift is studied experimentally. Two cases of the external electrical discharge circuit are considered. In the first case, the electrodes are closed by direct current, and in the second case, they are open. It is shown that direct current closure of the electrodes leads to a significant increase in the plasma potential and electron density. In a number of cases, local maxima of temperature and plasma density are observed near the electrodes, which can be associated with the occurrence of the azimuthal electron drift in crossed electric and magnetic fields.
ISSN:1063-780X
1562-6938
DOI:10.1134/S1063780X2110010X