Influence of an External Circuit on the Plasma Parameters in the Channel of the Radio-Frequency Accelerator with a Closed Electron Drift
The axial distribution of the plasma potential, electron density and temperature in a capacitive RF plasma source with the geometry of an accelerator with a closed electron drift is studied experimentally. Two cases of the external electrical discharge circuit are considered. In the first case, the...
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Published in | Plasma physics reports Vol. 47; no. 10; pp. 1075 - 1079 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
Moscow
Pleiades Publishing
01.10.2021
Springer Nature B.V |
Subjects | |
Online Access | Get full text |
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Summary: | The axial distribution of the plasma potential, electron density and temperature in a capacitive RF plasma source with the geometry of an accelerator with a closed electron drift is studied experimentally. Two cases of the external electrical discharge circuit are considered. In the first case, the electrodes are closed by direct current, and in the second case, they are open. It is shown that direct current closure of the electrodes leads to a significant increase in the plasma potential and electron density. In a number of cases, local maxima of temperature and plasma density are observed near the electrodes, which can be associated with the occurrence of the azimuthal electron drift in crossed electric and magnetic fields. |
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ISSN: | 1063-780X 1562-6938 |
DOI: | 10.1134/S1063780X2110010X |