Simulation and Experiment Based on FSMLC Method with EUPI Hysteresis Compensation for a Piezo-Driven Micro Position Stage

• Published in: Journal of systems science and complexity Vol. 32; no. 5; pp. 1340 - 1357
• Main Authors: Gao, Jinhai, Hao, Lina, Cheng, Hongtai, Cao, Ruimin, Sun, Zhiyong
• Format: Journal Article
• Language: English
• Published: Beijing Academy of Mathematics and Systems Science, Chinese Academy of Sciences 01.10.2019; Springer Nature B.V
• Subjects: Actuators; CMOS; Complex Systems; Computer simulation; Control; Hysteresis; Mathematical models; Mathematics; Mathematics and Statistics; Mathematics of Computing; Micropositioning; Model accuracy; Operations Research/Decision Theory; Parameters; Statistics; Systems Theory; Tracking; Trajectory analysis; hysteresis compensation; EUPI; micro position stage; sliding-mode-like-control; fuzzy

Micro/nano positioning technologies have been attractive for decades in industrial and scientific applications fields. The actuators have inherent hysteresis that can cause system unexpected behave in some extend. In this research, the authors used extented unparallel Prandtl-Ishlinshii (EUPI) model...