Simulation and Experiment Based on FSMLC Method with EUPI Hysteresis Compensation for a Piezo-Driven Micro Position Stage

Micro/nano positioning technologies have been attractive for decades in industrial and scientific applications fields. The actuators have inherent hysteresis that can cause system unexpected behave in some extend. In this research, the authors used extented unparallel Prandtl-Ishlinshii (EUPI) model...

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Bibliographic Details
Published inJournal of systems science and complexity Vol. 32; no. 5; pp. 1340 - 1357
Main Authors Gao, Jinhai, Hao, Lina, Cheng, Hongtai, Cao, Ruimin, Sun, Zhiyong
Format Journal Article
LanguageEnglish
Published Beijing Academy of Mathematics and Systems Science, Chinese Academy of Sciences 01.10.2019
Springer Nature B.V
Subjects
Actuators
CMOS
Complex Systems
Computer simulation
Control
Hysteresis
Mathematical models
Mathematics
Mathematics and Statistics
Mathematics of Computing
Micropositioning
Model accuracy
Operations Research/Decision Theory
Parameters
Statistics
Systems Theory
Tracking
Trajectory analysis
hysteresis compensation
EUPI
micro position stage
sliding-mode-like-control
fuzzy
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Summary:Micro/nano positioning technologies have been attractive for decades in industrial and scientific applications fields. The actuators have inherent hysteresis that can cause system unexpected behave in some extend. In this research, the authors used extented unparallel Prandtl-Ishlinshii (EUPI) models to represent the input-output relationship of a piezo-driven micro position stage. Integral inverse (I-I) compensator is used for compensating the hysteresis characteristics of the micro positioning stage and compared with direct inverse (D-I) compensator and inverse model (I-M) compensator. However, the accuracy and the robustness of the I-I compensator are worse when there is noisy in the system, a novel sliding-mode-like-control with EUPI (SMLC-EUPI) method was proposed and analyzed by different trajectory tracking experiments in Matlab environment. Though the above strategies can alleviate most deviation, the adjustment of the SMLC’s parameters is very complex. So the fuzzy method is used to adjust these parameters and be verified by trajectory tracking experiments. Finally, for validating the proposed control method, the paper did the corresponding experiment in microscope with CMOS and obtained convincing results.
ISSN:1009-6124
1559-7067
DOI:10.1007/s11424-018-7314-6