Laser Etching of Germanium
Investigation of a polished surface of germanium single crystals scanned with a focused beam of pulse-frequency modulated UV radiation of Nd:YAG laser showed evidence of laser-induced surface etching at subthreshold energy densities ( E ∼ 0.5–1.15 J/cm 2 ) in the absence of noticeable traces of crat...
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| Published in | Technical physics letters Vol. 47; no. 10; pp. 734 - 736 |
|---|---|
| Main Authors | , , , , , , , , |
| Format | Journal Article |
| Language | English |
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Moscow
Pleiades Publishing
01.10.2021
Springer Nature B.V |
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| Abstract | Investigation of a polished surface of germanium single crystals scanned with a focused beam of pulse-frequency modulated UV radiation of Nd:YAG laser showed evidence of laser-induced surface etching at subthreshold energy densities (
E
∼ 0.5–1.15 J/cm
2
) in the absence of noticeable traces of crater formation. It is suggested that the ablation centers nucleate on dislocations escaping at the surface of germanium crystals. |
|---|---|
| AbstractList | Investigation of a polished surface of germanium single crystals scanned with a focused beam of pulse-frequency modulated UV radiation of Nd:YAG laser showed evidence of laser-induced surface etching at subthreshold energy densities (E ∼ 0.5–1.15 J/cm2) in the absence of noticeable traces of crater formation. It is suggested that the ablation centers nucleate on dislocations escaping at the surface of germanium crystals. Investigation of a polished surface of germanium single crystals scanned with a focused beam of pulse-frequency modulated UV radiation of Nd:YAG laser showed evidence of laser-induced surface etching at subthreshold energy densities ( E ∼ 0.5–1.15 J/cm 2 ) in the absence of noticeable traces of crater formation. It is suggested that the ablation centers nucleate on dislocations escaping at the surface of germanium crystals. |
| Author | Malinskiy, T. V. Filin, S. A. Ivanova, A. I. Khomich, Yu. V. Kaplunov, I. A. Rogalin, V. E. Zheleznov, V. Yu Mikolutskiy, S. I. Yamshchikov, V. A. |
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| Copyright | Pleiades Publishing, Ltd. 2021. ISSN 1063-7850, Technical Physics Letters, 2021, Vol. 47, No. 10, pp. 734–736. © Pleiades Publishing, Ltd., 2021. ISSN 1063-7850, Technical Physics Letters, 2021. © Pleiades Publishing, Ltd., 2021. Russian Text © The Author(s), 2021, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2021, Vol. 47, No. 14, pp. 18–20. |
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| Keywords | germanium single crystal UV laser optical breakdown threshold nanosecond pulse ablation laser etching |
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| SubjectTerms | Ablation Classical and Continuum Physics Crystals Etching Germanium Ion beams Laser etching Neodymium lasers Physics Physics and Astronomy Semiconductor lasers Single crystals Ultraviolet radiation YAG lasers |
| Title | Laser Etching of Germanium |
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