Laser Etching of Germanium
Investigation of a polished surface of germanium single crystals scanned with a focused beam of pulse-frequency modulated UV radiation of Nd:YAG laser showed evidence of laser-induced surface etching at subthreshold energy densities ( E ∼ 0.5–1.15 J/cm 2 ) in the absence of noticeable traces of crat...
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Published in | Technical physics letters Vol. 47; no. 10; pp. 734 - 736 |
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Main Authors | , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Moscow
Pleiades Publishing
01.10.2021
Springer Nature B.V |
Subjects | |
Online Access | Get full text |
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Summary: | Investigation of a polished surface of germanium single crystals scanned with a focused beam of pulse-frequency modulated UV radiation of Nd:YAG laser showed evidence of laser-induced surface etching at subthreshold energy densities (
E
∼ 0.5–1.15 J/cm
2
) in the absence of noticeable traces of crater formation. It is suggested that the ablation centers nucleate on dislocations escaping at the surface of germanium crystals. |
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ISSN: | 1063-7850 1090-6533 |
DOI: | 10.1134/S1063785021070282 |