Laser Etching of Germanium

Investigation of a polished surface of germanium single crystals scanned with a focused beam of pulse-frequency modulated UV radiation of Nd:YAG laser showed evidence of laser-induced surface etching at subthreshold energy densities ( E ∼ 0.5–1.15 J/cm 2 ) in the absence of noticeable traces of crat...

Full description

Saved in:
Bibliographic Details
Published inTechnical physics letters Vol. 47; no. 10; pp. 734 - 736
Main Authors Zheleznov, V. Yu, Malinskiy, T. V., Mikolutskiy, S. I., Rogalin, V. E., Filin, S. A., Khomich, Yu. V., Yamshchikov, V. A., Kaplunov, I. A., Ivanova, A. I.
Format Journal Article
LanguageEnglish
Published Moscow Pleiades Publishing 01.10.2021
Springer Nature B.V
Subjects
Ablation
Classical and Continuum Physics
Crystals
Etching
Germanium
Ion beams
Laser etching
Neodymium lasers
Physics
Physics and Astronomy
Semiconductor lasers
Single crystals
Ultraviolet radiation
YAG lasers
germanium single crystal
UV laser
optical breakdown threshold
nanosecond pulse
ablation
laser etching
Online AccessGet full text

Cover

More Information
Summary:Investigation of a polished surface of germanium single crystals scanned with a focused beam of pulse-frequency modulated UV radiation of Nd:YAG laser showed evidence of laser-induced surface etching at subthreshold energy densities ( E ∼ 0.5–1.15 J/cm 2 ) in the absence of noticeable traces of crater formation. It is suggested that the ablation centers nucleate on dislocations escaping at the surface of germanium crystals.
ISSN:1063-7850
1090-6533
DOI:10.1134/S1063785021070282