Oxidation Resistance of TiAlN Coatings Deposited by Dual High-Power Impulse Magnetron Sputtering

• Published in: Surface investigation, x-ray, synchrotron and neutron techniques Vol. 17; no. Suppl 1; pp. S128 - S135
• Main Authors: Grenadyorov, A. S., Oskirko, V. O., Zakharov, A. N., Oskomov, K. V., Semenov, V. A., Solovyev, A. A., Shmakov, A. N.
• Format: Journal Article
• Language: English
• Published: Moscow Pleiades Publishing 01.12.2023; Springer Nature B.V
• Subjects: Aluminum; Brookite; Chemistry and Materials Science; Coatings; Deformation resistance; Diffraction patterns; Elastic deformation; Elastic properties; Heat resistance; Heating; High temperature; Magnetron sputtering; Materials Science; Mechanical properties; Modulus of elasticity; Nanoindentation; Oxidation; Oxidation resistance; Phase composition; Plastic deformation; Plasticity index; Room temperature; Spinodal decomposition; Substrates; Surfaces and Interfaces; Synchrotron radiation; Thermal resistance; Thin Films; Titanium dioxide; hardness; dual magnetron sputtering; nitride; high-power impulse magnetron sputtering; TiAlN coatings; oxidation; X-ray diffraction; heat resistance; synchrotron radiation; rutile
• ISSN: 1027-4510; 1819-7094
• DOI: 10.1134/S1027451023070157

Ti 1 –  x Al x N coatings with different Al content ( x = 0.1–0.43) are grown on WC–Co substrates by dual high-power impulse magnetron sputtering in the Ar/N 2 atmosphere. The coating resistance to high-temperature oxidation is determined. For this, the phase composition change is investigated by sy...