Oxidation Resistance of TiAlN Coatings Deposited by Dual High-Power Impulse Magnetron Sputtering

• Published in: Surface investigation, x-ray, synchrotron and neutron techniques Vol. 17; no. Suppl 1; pp. S128 - S135
• Main Authors: Grenadyorov, A. S., Oskirko, V. O., Zakharov, A. N., Oskomov, K. V., Semenov, V. A., Solovyev, A. A., Shmakov, A. N.
• Format: Journal Article
• Language: English
• Published: Moscow Pleiades Publishing 01.12.2023; Springer Nature B.V
• Subjects: Aluminum; Brookite; Chemistry and Materials Science; Coatings; Deformation resistance; Diffraction patterns; Elastic deformation; Elastic properties; Heat resistance; Heating; High temperature; Magnetron sputtering; Materials Science; Mechanical properties; Modulus of elasticity; Nanoindentation; Oxidation; Oxidation resistance; Phase composition; Plastic deformation; Plasticity index; Room temperature; Spinodal decomposition; Substrates; Surfaces and Interfaces; Synchrotron radiation; Thermal resistance; Thin Films; Titanium dioxide; hardness; dual magnetron sputtering; nitride; high-power impulse magnetron sputtering; TiAlN coatings; oxidation; X-ray diffraction; heat resistance; synchrotron radiation; rutile
• ISSN: 1027-4510; 1819-7094
• DOI: 10.1134/S1027451023070157

Ti 1 –  x Al x N coatings with different Al content ( x = 0.1–0.43) are grown on WC–Co substrates by dual high-power impulse magnetron sputtering in the Ar/N 2 atmosphere. The coating resistance to high-temperature oxidation is determined. For this, the phase composition change is investigated by synchrotron radiation during heating in the air from room temperature to 1100°С. Mechanical properties (hardness, elastic modulus, plasticity index, and plastic deformation resistance) are determined by nanoindentation of coatings before and after heating to 1100°С. X-ray diffraction patterns demonstrate the formation of the TiO 2 phase on the surface of all coatings, while the formation temperature and the phase type (brookite or rutile) depend on the Al content in the coating. All coatings are not subject to spinodal decomposition into the TiN and AlN phases after heating to 1100°С. The Ti 0.57 Al 0.43 N coating possesses the highest heat resistance; it undergoes the smallest change in the phase composition and mechanical properties after the high-temperature treatment.