CHEMICAL STRUCTURE AND FUNCTIONAL PROPERTIES OF AMORPHOUS BORON CARBONITRIDE FILMS

• Published in: Journal of structural chemistry Vol. 62; no. 8; pp. 1309 - 1324
• Main Authors: Sulyaeva, V. S., Gatapova, E. Ya, Kozhevnikov, A. K., Rogilo, D. I., Saraev, A. A., Yushina, I. V., Khomyakov, M. N., Shapovalova, A. A., Shayapov, V. R., Bhaskar, N., Tu, R., Kosinova, M. L.
• Format: Journal Article
• Language: English
• Published: Moscow Pleiades Publishing 01.08.2021; Springer Nature B.V
• Subjects: Argon; Atomic; Atomic/Molecular Structure and Spectra; Boron carbide; Carbon nitride; Chemical bonds; Chemistry; Chemistry and Materials Science; Composition; Contact angle; Deposition; Free energy; Fused silica; Gas mixtures; Inorganic Chemistry; Magnetron sputtering; Modulus of elasticity; Molecular; Morphology; Optical and Plasma Physics; Physical Chemistry; Refractivity; Silicon dioxide; Solid State Physics; Surface properties; Surface stability; magnetron sputtering; optical properties; surface wettability; mechanical properties; boron carbonitride; thin films
• ISSN: 0022-4766; 1573-8779
• DOI: 10.1134/S0022476621080187

We report a comprehensive study of the effect of the chemical structure of boron carbonitride films on the variability of their functional characteristics. The BC x N y films are prepared on Si(100) and fused silica substrates by reactive magnetron sputtering of a B 4 C target in an argon/nitrogen mixture. The deposition rate, elemental composition, and types of chemical bonds in the films is studied depending on the nitrogen content in the gas mixture. Optical (refractive index, transmission coefficient, band gap) and mechanical (hardness, Young′s modulus, substrate adhesion) characteristics are investigated depending on the deposition parameters and the chemical structure of the films. Particular attention is paid to the surface properties of the BC x N y films (morphology, roughness, contact angle, and surface free energy). Stability of the BC x N y films upon storage in air is studied for the first time. The data obtained for the composition, structural characteristics, and some functional properties of the BC x N y films are compared with those reported in literature.